DocumentCode
2237889
Title
MDmeshTM: innovative technology for high voltage Power MOSFETs
Author
Saggio, Mario ; Fagone, Domenico ; Musumeci, Salvatore
Author_Institution
R&D Dept., STMicroelectron., Catania, Italy
fYear
2000
fDate
2000
Firstpage
65
Lastpage
68
Abstract
A new PowerMOSFET device, called MDmeshTM (Multiple Drain mesh), that joins the best performance in the Power management market either in static and dynamic behavior is presented. A strong reduction in the silicon conduction losses per area allowed a valuable resize of the device area and a reduction of the used package volume. Moreover, a valuable reduction in device internal capacitance and gate charge has been observed and an optimized switching behavior has been obtained. A deep look inside the device performances will be presented and the main device features will be compared with the ones of a device having the same conduction losses fabricated with a standard technology
Keywords
power MOSFET; semiconductor device models; MDmesh; Multiple Drain mesh; Si conduction losses per area; dynamic behavior; gate charge; high voltage Power MOSFETs; internal capacitance; optimized switching behavior; static behavior; used package volume; Breakdown voltage; Conductivity; Doping; Fingers; Frequency; MOSFETs; Production; Silicon; Strips; Switching loss;
fLanguage
English
Publisher
ieee
Conference_Titel
Power Semiconductor Devices and ICs, 2000. Proceedings. The 12th International Symposium on
Conference_Location
Toulouse
ISSN
1063-6854
Print_ISBN
0-7803-6269-1
Type
conf
DOI
10.1109/ISPSD.2000.856774
Filename
856774
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