• DocumentCode
    2237889
  • Title

    MDmeshTM: innovative technology for high voltage Power MOSFETs

  • Author

    Saggio, Mario ; Fagone, Domenico ; Musumeci, Salvatore

  • Author_Institution
    R&D Dept., STMicroelectron., Catania, Italy
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    65
  • Lastpage
    68
  • Abstract
    A new PowerMOSFET device, called MDmeshTM (Multiple Drain mesh), that joins the best performance in the Power management market either in static and dynamic behavior is presented. A strong reduction in the silicon conduction losses per area allowed a valuable resize of the device area and a reduction of the used package volume. Moreover, a valuable reduction in device internal capacitance and gate charge has been observed and an optimized switching behavior has been obtained. A deep look inside the device performances will be presented and the main device features will be compared with the ones of a device having the same conduction losses fabricated with a standard technology
  • Keywords
    power MOSFET; semiconductor device models; MDmesh; Multiple Drain mesh; Si conduction losses per area; dynamic behavior; gate charge; high voltage Power MOSFETs; internal capacitance; optimized switching behavior; static behavior; used package volume; Breakdown voltage; Conductivity; Doping; Fingers; Frequency; MOSFETs; Production; Silicon; Strips; Switching loss;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Power Semiconductor Devices and ICs, 2000. Proceedings. The 12th International Symposium on
  • Conference_Location
    Toulouse
  • ISSN
    1063-6854
  • Print_ISBN
    0-7803-6269-1
  • Type

    conf

  • DOI
    10.1109/ISPSD.2000.856774
  • Filename
    856774