Title :
Cost of Ownership Model for Process Gas Improvements
Author :
Kellam, Mark ; Osburn, Carlton ; Wechter, Steve
Author_Institution :
North Carolina State University
Keywords :
Circuit faults; Costs; Fabrication; Materials processing; Microelectronics; Predictive models; Production; Productivity; Semiconductor device modeling; Yttrium;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
DOI :
10.1109/ASMC.1993.682517
