DocumentCode
2238183
Title
Cost of Ownership Model for Process Gas Improvements
Author
Kellam, Mark ; Osburn, Carlton ; Wechter, Steve
Author_Institution
North Carolina State University
fYear
1993
fDate
18-19 Oct 1993
Firstpage
220
Lastpage
222
Keywords
Circuit faults; Costs; Fabrication; Materials processing; Microelectronics; Predictive models; Production; Productivity; Semiconductor device modeling; Yttrium;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
Type
conf
DOI
10.1109/ASMC.1993.682517
Filename
682517
Link To Document