DocumentCode :
2238907
Title :
Highly sensitive and selective ammonia gas sensor
Author :
Yun, Dong Hyun ; Kwon, Chul Han ; Hong, Hyung-Ki ; Kim, Seung-Ryeol ; Lee, Kyuchung ; Song, Ho Geun ; Kim, Ji Eon
Author_Institution :
Devices & Mater. Lab., LG Corp. Inst. of Technol., Seoul, South Korea
Volume :
2
fYear :
1997
fDate :
16-19 Jun 1997
Firstpage :
959
Abstract :
We have fabricated and examined an ammonia gas sensor with high sensitivity using thick-film technology. The sensing material of the gas sensor is FeOx-WO3-SnO2 oxide semiconductor. The sensor exhibits resistance increase upon exposure to low concentration of ammonia gas. The resistance of the sensor is decreased, on the other hand, for exposure to reducing gases such as ethyl alcohol, methane, propane and carbon monoxide. We have proposed and investigated a novel method for detecting ammonia gas quite selectively by using a sensor array with two sensing elements which contains an ammonia gas sensor and a compensation element. The compensation element is a Pt-doped WO3-SnO2 gas sensor which shows an opposite direction of resistance change in comparison with the ammonia gas sensor upon exposure to ammonia gas. Excellent selectivity has been achieved using the sensor array with two sensing elements
Keywords :
air pollution measurement; ammonia; arrays; electric resistance; gas sensors; iron compounds; semiconductor materials; thick film devices; tin compounds; tungsten compounds; CO; FeO-WO3-SnO2; FeOx-WO3-SnO2 oxide semiconductor; NH3; Pt-doped WO3-SnO2 gas sensor; WO3-SnO2:Pt; air pollution; carbon monoxide; compensation element; ethyl alcohol; fabrication; high sensitivity; low concentration; methane; propane; reducing gases; resistance decrease; resistance increase; screen printing technique; selective ammonia gas sensor; sensing material; sensor array; thick-film technology; two sensing elements; Carbon dioxide; Chemical elements; Electrodes; Gas detectors; Gases; Laboratories; Semiconductor materials; Sensor arrays; Substrates; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
Type :
conf
DOI :
10.1109/SENSOR.1997.635262
Filename :
635262
Link To Document :
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