Title :
Commercialization of silicon-based gas sensors
Author :
Lyle, Robert P. ; Walters, Dean
Author_Institution :
Motorola Inc., Phoenix, AZ, USA
Abstract :
Large scale production capability of silicon based tin oxide gas sensors has been established. It is well known that metal oxide gas sensors are sensitive to both ambient temperature and relative humidity. Humidity compensation is accomplished through use of a specific sequential mode of operation. Device sensitivity from zero to 400 ppm CO over the range of 20% to 80% relative humidity is presented
Keywords :
elemental semiconductors; gas sensors; humidity; semiconductor device manufacture; semiconductor materials; silicon; tin compounds; CO; Si-SnO2; Si-based gas sensors; ambient temperature; commercialization; humidity compensation; large scale production capability; metal oxide gas sensors; polysilicon layer; relative humidity; specific sequential operation mode; tin oxide gas sensors; Commercialization; Gas detectors; Gases; Humidity; Packaging; Production; Resistors; Silicon; Temperature sensors; Tin;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635266
