• DocumentCode
    2240054
  • Title

    Sub-30nm spatial resolution imaging using a tabletop 13nm high harmonic source

  • Author

    Seaberg, Matthew D. ; Adams, Daniel E. ; Schlotter, William F. ; Liu, Yanwei ; Menoni, Carmen ; Murnane, Margaret ; Kapteyn, Henry

  • Author_Institution
    Dept. of Phys. & JILA, Univ. of Colorado & NIST, Boulder, CO, USA
  • fYear
    2011
  • fDate
    1-6 May 2011
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We report the highest spatial resolution (<;30nm) imaging to-date using a tabletop x-ray microscope in any imaging modality. High-harmonic light at 13nm illuminates an object, with images retrieved by iterative phase retrieval of the scatter pattern.
  • Keywords
    X-ray microscopy; image resolution; imaging modality; iterative phase retrieval; scatter pattern; size 13 nm; spatial resolution imaging; tabletop X-ray microscope; tabletop high harmonic source; Laser beams; Microscopy; Spatial resolution; X-ray imaging; X-ray lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2011 Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-4577-1223-4
  • Type

    conf

  • Filename
    5950612
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2240054