DocumentCode
2240698
Title
Software-based development of 3D integration flows
Author
Grunewald, Armin ; Kai Hahn ; Bruck, Roman
Author_Institution
Inst. of Microsyst. Eng., Univ. of Siegen, Siegen, Germany
fYear
2012
fDate
6-8 Nov. 2012
Firstpage
1
Lastpage
5
Abstract
In recent years 3D IC design and manufacturing is continuously emerging. Along with the variety of possibilities on how to vertically integrate two or more dies, many aspects including cost, design and choice of technology must be considered. Therefore a design methodology and software implementation is presented in this paper which makes use of the mutual dependency of design and process technology in order to provide a manufacturable integration flow.
Keywords
electronic engineering computing; integrated circuit design; integrated circuit manufacture; production engineering computing; three-dimensional integrated circuits; 3D IC design; 3D IC manufacturing; 3D integration flows; manufacturable integration flow; software-based development;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Manufacturing Technology Symposium (IEMT), 2012 35th IEEE/CPMT International
Conference_Location
Ipoh
ISSN
1089-8190
Print_ISBN
978-1-4673-4384-8
Electronic_ISBN
1089-8190
Type
conf
DOI
10.1109/IEMT.2012.6521773
Filename
6521773
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