Dilute hydrogen sulfide sensing properties of copper oxide-tin oxide thin film prepared by low-pressure evaporation

Author

Tamaki, Jun ; Shimanoe, Kengo ; Yamada, Yoshihiro ; Yamamoto, Yoshifumi ; Miura, Norio ; Yamazoe, Noboru

Author_Institution

Dept. of Chem., Ritsumeikan Univ., Kyoto, Japan

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

987

Abstract

Thin films of SnO₂ and CuO-SnO₂ were prepared by evaporation from tin and copper metals under a low pressure (1 torr) of air atmosphere. As observed with AFM, these evaporated films had unique microstructure in which discrete clusters of SnO₂ grains contacted to each other three-dimensionally with large mesopores penetrating between. The film added with a small amount of CuO was very sensitive to H₂S in air, being able to detect dilute H₂S close to 0.02 ppm at 300°C. The high sensitivity seems to result from the unique promoting effect of CuO coupled with the unique microstructure of the film

Keywords

atomic force microscopy; copper compounds; crystal microstructure; gas sensors; hydrogen compounds; p-n heterojunctions; semiconductor growth; semiconductor materials; semiconductor thin films; tin compounds; vapour deposited coatings; 1 torr; 300 degC; AFM; CuO-SnO₂; H₂S; SnO₂; SnO₂ grains; air atmosphere; copper metal; copper oxide-tin oxide thin film; dilute H₂S; dilute hydrogen sulfide sensing properties; discrete clusters; evaporated films; high sensitivity; large mesopores; low-pressure evaporation; microstructure; n-type SnO₂; p-type CuO; three-dimensional; tin metal; Atmosphere; Chemical sensors; Copper; Gas detectors; Hydrogen; Microstructure; Semiconductor films; Sensor phenomena and characterization; Tin; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635301

Filename

635301