Title :
CMOS sensor systems
Author :
Hosticka, Bedrich J.
Author_Institution :
Fraunhofer Inst. of Microelectron. Circuits & Syst., Duisburg, Germany
Abstract :
Sensor systems based on CMOS technology benefit not only from capability of silicon to realize both, sensing and electronic functions, but also from the manufacturing maturity that the CMOS technology has reached so far. In this contribution we discuss some of the important issues of the CMOS sensor system design, such as available technologies and devices, design and implementation of sensor electronics, and also pay attention to testing and reliability
Keywords :
CMOS integrated circuits; electric sensing devices; elemental semiconductors; integrated circuit design; integrated circuit reliability; silicon; CMOS sensor systems; Si; electronic functions; manufacturing maturity; reliability; sensing functions; sensor electronics; sensor system design; testing; CMOS technology; Intelligent sensors; Magnetic sensors; Manufacturing; Sensor arrays; Sensor phenomena and characterization; Sensor systems; Silicon; System testing; Temperature sensors;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635304
