• DocumentCode
    2242939
  • Title

    Enhanced light emission from InP substrate with nanoholes

  • Author

    Jung, Mi ; Lee, Seok ; Byun, Young Tae ; Jhon, Young Min ; Kim, Sun Ho ; Mho, Sun-il ; Woo, Deok Ha

  • Author_Institution
    Div. of Intell. Syst. Res.., Korea Inst. of Sci. & Technol., Seoul
  • fYear
    2007
  • fDate
    26-31 Aug. 2007
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We observed a significant enhancement in the light output from nanoholes on InP substrate covered with nanoporous alumina mask. The substrate was exposed in ambient gases by inductively coupled plasma reactive ion etching. Photoluminescence (PL) spectra of the substrate with alumina mask showed 4 times enhanced signal compared with that of a raw InP substrate.
  • Keywords
    III-V semiconductors; alumina; indium compounds; masks; nanostructured materials; photoluminescence; sputter etching; substrates; Al2O3; InP; inductively coupled plasma reactive ion etching; light emission; light output enhancement; nanoholes; nanoporous alumina mask; photoluminescence spectra; substrate; Etching; Gases; Indium phosphide; Nanoporous materials; Nanoscale devices; Photoluminescence; Plasma applications; Plasma temperature; Semiconductor materials; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
  • Conference_Location
    Seoul
  • Print_ISBN
    978-1-4244-1173-3
  • Electronic_ISBN
    978-1-4244-1174-0
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2007.4391343
  • Filename
    4391343
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2242939