Title :
Displacement and strain field measurements for nanotechnology applications
Author :
Vogel, Dietmar ; Keller, Jürgen ; Gollhardt, Astrid ; Michel, Bemd
Author_Institution :
Fraunhofer-Inst. fur Mikrostrukturtechnik, Berlin, Germany
Abstract :
The paper introduces a measurement method, which allows one to determine the incremental displacement and strain fields from Scanning Force Micrographs of different object states. Local cross correlation algorithms form the basis of the displacement computation. Capabilities and presumptions of the new method are discussed. Application features are demonstrated by the example of microcrack evaluation. Prospects for particle motion tracking by the tool are considered.
Keywords :
atomic force microscopy; crack detection; displacement measurement; microcracks; nanotechnology; strain measurement; displacement; displacement computation; incremental displacement; local cross correlation algorithms; measurement method; microcrack evaluation; nanotechnology applications; object states; particle motion tracking; scanning force micrographs; strain field measurements; Displacement measurement; Force measurement; Kinematics; Nanotechnology; Optical imaging; Optical microscopy; Scanning electron microscopy; Size measurement; Stability; Strain measurement;
Conference_Titel :
Nanotechnology, 2002. IEEE-NANO 2002. Proceedings of the 2002 2nd IEEE Conference on
Print_ISBN :
0-7803-7538-6
DOI :
10.1109/NANO.2002.1032118
