Title :
Finite element simulation strategies for microfluidic devices with chemical reactions
Author :
Hsing, I.-M. ; Srinivasan, R. ; Harold, M.P. ; Jensen, K.F. ; Schmidt, M.A.
Author_Institution :
MIT, Cambridge, MA, USA
Abstract :
We present a general Galerkin finite element method (GFEM) based model for simulation of two- and three-dimensional (2- and 3-D) fluid flow, thermal fields, and chemical species concentrations in microfluidic devices. This approach incorporates a flexible mesh generation procedure that enables us to explore different microfluidic device designs for chemical processing and chemical sensor applications. Simulation results are validated by comparisons with experimental data for a microchemical device. The good agreement between simulations and experiments demonstrates the ability of FEM solutions to provide accurate simulations of microfluidic chemical devices
Keywords :
Galerkin method; chemical sensors; chemical technology; finite element analysis; flow simulation; fluidic devices; microactuators; microsensors; 2-D fluid flow; 3-D fluid flow; Galerkin FEM model; chemical processing; chemical reactions; chemical sensor applications; chemical species concentrations; finite element simulation strategies; flexible mesh generation procedure; microchemical device; microfluidic chemical devices; microfluidic devices; microreactor technology; thermal fields; Biological system modeling; Chemical processes; Chemical sensors; Chemical technology; Chemical vapor deposition; Finite element methods; Inductors; Mesh generation; Microfluidics; Toxic chemicals;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635357