DocumentCode
2244908
Title
Low-Stress Organic membrane for High-Resolution Variable Optical Attenuator
Author
Li, Chao-Hu ; Chiu, Chen-Wei E. ; Chen, Tyng-Yow ; Su, Guo-Dung J.
Author_Institution
Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei
fYear
2007
fDate
26-31 Aug. 2007
Firstpage
1
Lastpage
2
Abstract
A variable optical attenuator consisting of organic membrane has been fabricated by MEMS technology. The attenuation is achieved by changing the focal length of the deformable membrane. The attenuation range is 20 dB with low PDL and actuated voltage is around 80 V.
Keywords
membranes; micro-optomechanical devices; micromachining; optical attenuators; optical communication equipment; optical fibre networks; organic compounds; MEMS technology; deformable membrane; high-resolution variable optical attenuator; low-stress organic membrane; micromachining technology; optical attenuation; optical fiber networks; Biomembranes; Electrostatics; Laser beams; Micromechanical devices; Mirrors; Optical attenuators; Optical fiber polarization; Page description languages; Voltage; Wavelength division multiplexing;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location
Seoul
Print_ISBN
978-1-4244-1173-3
Electronic_ISBN
978-1-4244-1174-0
Type
conf
DOI
10.1109/CLEOPR.2007.4391430
Filename
4391430
Link To Document