Title :
Low-Stress Organic membrane for High-Resolution Variable Optical Attenuator
Author :
Li, Chao-Hu ; Chiu, Chen-Wei E. ; Chen, Tyng-Yow ; Su, Guo-Dung J.
Author_Institution :
Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei
Abstract :
A variable optical attenuator consisting of organic membrane has been fabricated by MEMS technology. The attenuation is achieved by changing the focal length of the deformable membrane. The attenuation range is 20 dB with low PDL and actuated voltage is around 80 V.
Keywords :
membranes; micro-optomechanical devices; micromachining; optical attenuators; optical communication equipment; optical fibre networks; organic compounds; MEMS technology; deformable membrane; high-resolution variable optical attenuator; low-stress organic membrane; micromachining technology; optical attenuation; optical fiber networks; Biomembranes; Electrostatics; Laser beams; Micromechanical devices; Mirrors; Optical attenuators; Optical fiber polarization; Page description languages; Voltage; Wavelength division multiplexing;
Conference_Titel :
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-1173-3
Electronic_ISBN :
978-1-4244-1174-0
DOI :
10.1109/CLEOPR.2007.4391430
