DocumentCode
2245436
Title
Parallel laser microfabrication of three-dimensional structures corrected for optical aberrations
Author
Salter, Patrick ; Jesacher, Alexander ; Simmonds, Richard ; Booth, Martin
Author_Institution
Dept. of Eng. Sci., Univ. of Oxford, Oxford, UK
fYear
2011
fDate
1-6 May 2011
Firstpage
1
Lastpage
2
Abstract
An adaptive optical element is employed to generate multiple fabrication spots while also compensating for any optical aberration present in the system. We present rapid diffraction limited optical fabrication in a range of interesting substrates.
Keywords
aberrations; adaptive optics; holography; laser materials processing; micro-optics; microfabrication; optical fabrication; adaptive optical element; diffraction limited optical fabrication; multiple fabrication spots; optical aberrations; parallel laser microfabrication; three-dimensional structures; Adaptive optics; Holographic optical components; Holography; Optical device fabrication; Optical diffraction; Optical variables control;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location
Baltimore, MD
Print_ISBN
978-1-4577-1223-4
Type
conf
Filename
5950831
Link To Document