DocumentCode
2245517
Title
High Average Power and High Repetition Solid State Laser for EUV Lithography
Author
Fujita, Hisanori ; Nakatsuka, Masahiro ; Bhushan, Ravi ; Tsubakimoto, Kouji ; Yoshida, Hidetsugu ; Miyanaga, Noriaki ; Izawa, Yasukazu
Author_Institution
Inst. of Laser Eng., Osaka Univ., Osaka
fYear
2007
fDate
26-31 Aug. 2007
Firstpage
1
Lastpage
2
Abstract
We have been developing a high repetition (5 kHz) and high power (5 kW) Nd:YAG laser system pumped by cw LDs for EUV lithography. Design concepts and experimental results will be reported.
Keywords
neodymium; optical pumping; solid lasers; ultraviolet lithography; EUV lithography; YAG:Nd; frequency 5 kHz; high average power laser; high repetition solid state laser; optical pumping; power 5 kW; Fiber lasers; Laser excitation; Laser modes; Lithography; Power lasers; Pulse amplifiers; Pulse modulation; Pump lasers; Semiconductor laser arrays; Solid lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location
Seoul
Print_ISBN
978-1-4244-1173-3
Electronic_ISBN
978-1-4244-1174-0
Type
conf
DOI
10.1109/CLEOPR.2007.4391454
Filename
4391454
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