Dynamic tuning of birefringence in silicon waveguides

Author

Tsia, Kevin K. ; Fathpour, Sasan ; Jalali, Bahram

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA

fYear

2008

fDate

4-9 May 2008

Firstpage

1

Lastpage

2

Abstract

This paper is the first report on dynamic control of birefringence in silicon-on-insulator (SOI) waveguides by electronically tuning the stress in the waveguide. The dynamic stress is induced by a thin-film piezoelectric transducer integrated on top of the waveguide. Integrated piezoelectric transducers are used to electrically vary the dispersion in a silicon optical waveguide.

Keywords

electro-optical devices; elemental semiconductors; integrated optoelectronics; mechanical birefringence; optical tuning; optical waveguides; piezoelectric transducers; silicon; silicon compounds; silicon-on-insulator; thin film devices; Si; Si-SiO₂; birefringence dynamic tuning; dispersion aspects; integrated thin film piezoelectric transducers; silicon optical waveguides; silicon-on-insulator waveguides; stress engineering; Birefringence; Capacitors; Electrodes; Electromagnetic waveguides; Integrated optics; Optical films; Optical waveguides; Piezoelectric films; Silicon; Stress; (130.3120) Integrated optics devices; (230.7370) Waveguides;

fLanguage

English

Publisher

iet

Conference_Titel

Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on

Conference_Location

San Jose, CA

Print_ISBN

978-1-55752-859-9

Type

conf

Filename

4571863