Title :
Kinetics of the C49-C54 phase transition in TiSi2: new indications from sheet resistance, infrared spectroscopy and molecular dynamics simulations
Author :
Grimaldi, M.G. ; Via, F. La ; Bocelli, S. ; Galli, M. ; Marabelli, F. ; Miglio, L. ; Bonoli, F.
Author_Institution :
Dept. of Phys., Catania Univ., Italy
Abstract :
The aim of this work is the crossed analysis of new theoretical and experimental results in order to obtain a comprehensive picture of the C49-C54 phase transition in TiSi/sub 2/. We report results of sheet resistance measurements and of infrared spectroscopy as a function of the annealing time, as well as the first preliminary results of molecular dynamics for TiSi/sub 2/ in relation to the structural phase transition.
Keywords :
electrical resistivity; infrared spectra; metallic thin films; metallisation; molecular dynamics method; rapid thermal annealing; solid-state phase transformations; titanium compounds; C49-C54 structural phase transition kinetics; RTA; TiSi/sub 2/; TiSi/sub 2/ film; annealing; infrared spectroscopy; molecular dynamics simulation; sheet resistance; Annealing; Atomic force microscopy; Grain size; Infrared spectra; Inorganic materials; Kinetic theory; Metallization; Physics; Silicides; Temperature;
Conference_Titel :
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location :
Villard de Lans, France
DOI :
10.1109/MAM.1997.621078
