DocumentCode
2246615
Title
Fabrication of Micron-scale Elliptical Structures for Vertical Optical Via Applications
Author
Lee, M.W. ; Choi, C.H. ; Sung, J.H. ; Kim, B.S. ; Park, S.G. ; Lee, S.G. ; Lee, E.H. ; O, B.H.
Author_Institution
OPERA, Inha Univ., Incheon
fYear
2007
fDate
26-31 Aug. 2007
Firstpage
1
Lastpage
2
Abstract
Previously proposed shape of the optical via structures are simple 45 degree mirrors with or without metal coatings, and simple elliptical shapes. To improve alignment tolerance and coupling efficiency, various shape of the optical via structures are fabricated and optical characteristics of the shapes are measured.
Keywords
micro-optics; mirrors; optical interconnections; elliptical shape; micron-scale elliptical structure fabrication; mirrors; vertical optical via; Costs; High speed optical techniques; Integrated optics; Optical device fabrication; Optical losses; Optical reflection; Printed circuits; Resists; Shape measurement; Transportation;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location
Seoul
Print_ISBN
978-1-4244-1173-3
Electronic_ISBN
978-1-4244-1174-0
Type
conf
DOI
10.1109/CLEOPR.2007.4391504
Filename
4391504
Link To Document