• DocumentCode
    2246615
  • Title

    Fabrication of Micron-scale Elliptical Structures for Vertical Optical Via Applications

  • Author

    Lee, M.W. ; Choi, C.H. ; Sung, J.H. ; Kim, B.S. ; Park, S.G. ; Lee, S.G. ; Lee, E.H. ; O, B.H.

  • Author_Institution
    OPERA, Inha Univ., Incheon
  • fYear
    2007
  • fDate
    26-31 Aug. 2007
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Previously proposed shape of the optical via structures are simple 45 degree mirrors with or without metal coatings, and simple elliptical shapes. To improve alignment tolerance and coupling efficiency, various shape of the optical via structures are fabricated and optical characteristics of the shapes are measured.
  • Keywords
    micro-optics; mirrors; optical interconnections; elliptical shape; micron-scale elliptical structure fabrication; mirrors; vertical optical via; Costs; High speed optical techniques; Integrated optics; Optical device fabrication; Optical losses; Optical reflection; Printed circuits; Resists; Shape measurement; Transportation;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
  • Conference_Location
    Seoul
  • Print_ISBN
    978-1-4244-1173-3
  • Electronic_ISBN
    978-1-4244-1174-0
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2007.4391504
  • Filename
    4391504