Nondestructive 3D imaging of femtosecond laser written buried structures using optical coherence microscopy

Author

Choi, Jiyeon ; Lee, Kye-Sung ; Anderson, Troy ; Rolland, Jannick ; Richardson, Martin

Author_Institution

Coll. of Opt. & Photonics, Univ. of Central Florida, Orlando, FL

fYear

2008

fDate

4-9 May 2008

Firstpage

1

Lastpage

2

Abstract

We have demonstrated nondestructive 3D imaging of the femtosecond laser written 3D structures of both index change and optical breakdown within fused silica by using the optical coherence microscopy providing high lateral and depth resolution.

Keywords

high-speed optical techniques; laser beam effects; laser materials processing; nondestructive testing; optical images; optical microscopy; refractive index; silicon compounds; SiO₂; depth resolution; femtosecond laser written buried structures; fused silica; lateral resolution; nondestructive 3D imaging; optical breakdown; optical coherence microscopy; refractive index change; Electric breakdown; High-resolution imaging; Optical attenuators; Optical imaging; Optical microscopy; Optical refraction; Optical sensors; Optical variables control; Refractive index; Ultrafast optics; (140.3390) Laser materials processing; (170.4500) Optical coherence tomography; (180.0180) Microscopy;

fLanguage

English

Publisher

iet

Conference_Titel

Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on

Conference_Location

San Jose, CA

Print_ISBN

978-1-55752-859-9

Type

conf

Filename

4571895