Title :
Nondestructive 3D imaging of femtosecond laser written buried structures using optical coherence microscopy
Author :
Choi, Jiyeon ; Lee, Kye-Sung ; Anderson, Troy ; Rolland, Jannick ; Richardson, Martin
Author_Institution :
Coll. of Opt. & Photonics, Univ. of Central Florida, Orlando, FL
Abstract :
We have demonstrated nondestructive 3D imaging of the femtosecond laser written 3D structures of both index change and optical breakdown within fused silica by using the optical coherence microscopy providing high lateral and depth resolution.
Keywords :
high-speed optical techniques; laser beam effects; laser materials processing; nondestructive testing; optical images; optical microscopy; refractive index; silicon compounds; SiO2; depth resolution; femtosecond laser written buried structures; fused silica; lateral resolution; nondestructive 3D imaging; optical breakdown; optical coherence microscopy; refractive index change; Electric breakdown; High-resolution imaging; Optical attenuators; Optical imaging; Optical microscopy; Optical refraction; Optical sensors; Optical variables control; Refractive index; Ultrafast optics; (140.3390) Laser materials processing; (170.4500) Optical coherence tomography; (180.0180) Microscopy;
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9
