The autonomous impact resonator: a new operation principle for a silicon resonant strain gauge

Author

Puers, Robert ; Bienstman, Jan ; Vandewalle, Joos

Author_Institution

Dept. ESAT, Katholieke Univ., Leuven, Belgium

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

1105

Abstract

A new oscillation principle for silicon resonators is described. Using only a capacitive microbridge, a resistor and a d.c. source, an autonomous oscillator can be obtained without the need for an external oscillator circuit. An electromechanical model is derived and a general mathematical description is given. The behaviour of the autonomous impact oscillator is simulated and a stability analysis is presented. Experimental results validate the proposed oscillation mechanism

Keywords

bridge circuits; circuit analysis computing; circuit stability; differential equations; elemental semiconductors; micromechanical resonators; nonlinear network analysis; silicon; Si; Si resonant strain gauge; autonomous impact oscillator; autonomous impact resonator; autonomous oscillator; capacitive microbridge; d.c. source; electromechanical model; external oscillator circuit; general mathematical description; oscillation mechanism; pull in; stability analysis; Capacitive sensors; Circuits; Electrodes; Electrostatics; Mechanical sensors; Oscillators; Resistors; Resonance; Silicon; Solid modeling;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635393

Filename

635393