Title :
Compact analytical models for squeeze film damping with arbitrary venting conditions
Author :
Darling, Robert ; Yang, Jian
Author_Institution :
Dept. of Electr. Eng., Washington Univ., Seattle, WA
Abstract :
A Green´s function method is described which allows the resulting forces from compressible squeeze film damping to be rapidly calculated for arbitrary acoustic venting conditions along the edges of a moveable structure. The resulting models are computationally compact, and thus applicable for dynamic system simulation purposes. Arbitrary deflection profiles can also be treated, enabling the calculation of damping effects for cantilevers, diaphragms, tilting modes, and drum-head modes
Keywords :
Green´s function methods; acoustic impedance; damping; diaphragms; micromechanical devices; modelling; Green´s function method; analytical models; arbitrary deflection profiles; arbitrary venting conditions; cantilevers; complex acoustic impedance; computationally compact models; diaphragms; drum-head modes; dynamic system simulation; linearized Reynold´s equation; micromachined structures; moveable structure edges; squeeze film damping; tilting modes; Acoustic transducers; Analytical models; Biomembranes; Boundary conditions; Computational modeling; Damping; Eigenvalues and eigenfunctions; Equations; Impedance; Solid state circuits;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635397
