Title :
Impact of airborne molecular contamination to nano-device performance
Author_Institution :
Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
Abstract :
In this paper, we detected most airborne molecular contamination (AMC) in our present cleanroom and in our specially equipped clean bench through air sampling and wafer sampling experiments. We then investigate the effects of AMC on device performance under different filter modules. We discovered that the NEUROFINE PTFE filter combined with the chemical filters has excellent controlling ability for metal, organic and inorganic contaminations. We believe that the novel filter combination can be used to further improve the device manufacturing environment when the device is continuously scaled down to nanometer generation.
Keywords :
chemical variables measurement; clean rooms; filtration; integrated circuit measurement; nanoelectronics; surface contamination; AMC; NEUROFINE PTFE filter; air sampling; airborne molecular contamination; chemical filters; clean bench; cleanroom; device down-scaling; device manufacturing environment; filter combination; filter modules; inorganic contamination; metal contamination; nano-device performance; nanometer device generation; organic contamination; wafer sampling; Chromium; Contamination; Filters; Industrial electronics; Inorganic chemicals; Manufacturing; Nanoscale devices; Organic chemicals; Oxidation; Sampling methods;
Conference_Titel :
Nanotechnology, 2002. IEEE-NANO 2002. Proceedings of the 2002 2nd IEEE Conference on
Print_ISBN :
0-7803-7538-6
DOI :
10.1109/NANO.2002.1032289
