Nonlinear electromechanical behaviour of an electrostatic microrelay

Author

Gretillat, M.A. ; Yang, Y.-J. ; Hung, E.S. ; Rabinovich, V. ; Ananthasuresh, G.K. ; de Rooij, Nico F. ; Senturia, S.D.

Author_Institution

Inst. of Microtechnol., Neuchatel Univ., Switzerland

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

1141

Abstract

In this paper experiments on the quasistatic and dynamic behaviour of the electrostatic polysilicon microrelay fabricated at IMT are presented together with new nonlinear dynamical models. The models simulate the pull-in voltage, the resonance frequency, the quality factor, the switching time and the electrostatic spring softening of the microrelay. Simulation of the pull-in voltage has been done with MIT´s MEMCAD system, the resonance frequency has been simulated with Abaqus ^TM, while macro-models developed at MIT have been used to simulate the dynamics of the nonlinear actuator in the presence of squeeze-film damping

Keywords

Q-factor; damping; electrostatic devices; elemental semiconductors; microactuators; modelling; resonance; semiconductor relays; silicon; Abaqus; MEMCAD system; Si; dynamic behaviour; electrostatic microrelay; electrostatic spring softening; macro-models; nonlinear actuator dynamics simulation; nonlinear dynamical models; nonlinear electromechanical behaviour; polysilicon microrelay; pull-in voltage; quality factor; quasistatic behaviour; resonance frequency; squeeze-film damping; switching time; Actuators; Electrostatics; Microrelays; Nonlinear dynamical systems; Q factor; Resonance; Resonant frequency; Softening; Springs; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635406

Filename

635406