Title :
Measurement and modelling of surface micromachined, electrostatically actuated microswitches
Author :
Majumder, Sumit ; McGruer, N.E. ; Zavracky, Paul M. ; Adams, George G. ; Morrison, Richard H. ; Krim, Jacqueline
Author_Institution :
Dept. of Electr. & Comput. Eng., Northeastern Univ., Boston, MA, USA
Abstract :
Electrostatically actuated micromechanical switches have been reported in earlier work by the authors. In the present work, a simple contact resistance model of the microswitch is discussed. Preliminary contact resistance measurements are presented, and compared with the modeled contact resistance characteristics
Keywords :
contact resistance; electrostatic devices; micromechanical devices; modelling; switches; Au; Ni; contact resistance measurements; contact resistance model; electrostatically actuated microswitches; micromechanical switches; modelling; surface micromachined microswitches; Contact resistance; Electrical resistance measurement; Electrostatic measurements; Gold; Microswitches; Rough surfaces; Structural beams; Surface resistance; Surface roughness; Voltage;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635407
