Title :
Development of micromachined switches with increased reliability
Author :
Hiltmann, Kai M. ; Schmidt, Bertram ; Sandmaier, Hermann ; Lang, Walter
Author_Institution :
Hahn-Schickard-Soc., Inst. of Micro- and Informationtechnol., Villingen-Schwenningen, Germany
Abstract :
By micromachining of silicon and glass, an electrical switch with low-resistance metal contacts was made. The switch is aimed at applications as a binary pressure sensor and to replace conventional push-button switches. First measurements on switches yielded electrical lifetimes over 105 cycles and contact resistance clearly below 1 Ω
Keywords :
borosilicate glasses; contact resistance; elemental semiconductors; life testing; micromachining; micromechanical devices; pressure sensors; semiconductor device reliability; semiconductor device testing; semiconductor switches; silicon; 1 ohm; 10 mA; 100 V; Si; Si membrane switches; Si-B2O3-SiO2; Si-BSG; Si/BSG micromachined switches; anodic bonding; binary pressure sensor; contact resistance; electrical lifetimes; electrical switch; low-resistance metal contacts; microswitch; reliability; testing; Biomembranes; Bonding; Contact resistance; Glass; Sensor systems; Silicon; Solid state circuits; Surface morphology; Switches; Switching circuits;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635410
