Title :
Electronics for micromachined inertial sensors
Author :
Boser, Bernhard E.
Author_Institution :
Sensor & Actuator Center, California Univ., Berkeley, CA, USA
Abstract :
Capacitive interface circuits for micromachined sensors are described. The focus is on the position sense electronics for accelerometers and gyroscopes. Special attention is given to the characteristics of the interface between the sensor and electronic circuits, and on practical and fundamental noise mechanisms that limit the achievable resolution
Keywords :
accelerometers; capacitance measurement; displacement measurement; gyroscopes; micromechanical resonators; microsensors; noise; accelerometers; capacitive interface circuits; capacitive sensing; electronic circuits; gyroscopes; integrated sensors; micromachined inertial sensors; noise mechanisms; position sense electronics; resolution; Acceleration; Accelerometers; Capacitive sensors; Capacitors; Circuits; Gyroscopes; Mechanical sensors; Sensor phenomena and characterization; Springs; Temperature sensors;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635413
