Title :
A 3-axis force balanced accelerometer using a single proof-mass
Author :
Lemkin, Mark A. ; Boser, Bernhard E. ; Auslander, David ; Smith, Jim H.
Author_Institution :
California Univ., Berkeley, CA, USA
Abstract :
This paper presents a new method for wideband force balancing a proof-mass in multiple axes simultaneously. Capacitive position sense and force feedback are accomplished using the same air-gap capacitors through time multiplexing. Proof of concept is experimentally demonstrated with a single-mass monolithic surface micromachined 3-axis accelerometer
Keywords :
CMOS integrated circuits; accelerometers; capacitance measurement; circuit feedback; force control; microsensors; sigma-delta modulation; 3-axis force balanced accelerometer; air-gap capacitors; capacitive position sensing; digital CMOS technology; force feedback; multiple axes; sigma-delta feedback loops; single proof-mass; single-mass monolithic surface micromachined 3-axis accelerometer; time multiplexing; wideband force balancing; Acceleration; Accelerometers; Bridge circuits; CMOS technology; Delta-sigma modulation; Feedback loop; Force feedback; Frequency; Mechanical sensors; Wideband;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635417
