DocumentCode
2247658
Title
A 3-axis force balanced accelerometer using a single proof-mass
Author
Lemkin, Mark A. ; Boser, Bernhard E. ; Auslander, David ; Smith, Jim H.
Author_Institution
California Univ., Berkeley, CA, USA
Volume
2
fYear
1997
fDate
16-19 Jun 1997
Firstpage
1185
Abstract
This paper presents a new method for wideband force balancing a proof-mass in multiple axes simultaneously. Capacitive position sense and force feedback are accomplished using the same air-gap capacitors through time multiplexing. Proof of concept is experimentally demonstrated with a single-mass monolithic surface micromachined 3-axis accelerometer
Keywords
CMOS integrated circuits; accelerometers; capacitance measurement; circuit feedback; force control; microsensors; sigma-delta modulation; 3-axis force balanced accelerometer; air-gap capacitors; capacitive position sensing; digital CMOS technology; force feedback; multiple axes; sigma-delta feedback loops; single proof-mass; single-mass monolithic surface micromachined 3-axis accelerometer; time multiplexing; wideband force balancing; Acceleration; Accelerometers; Bridge circuits; CMOS technology; Delta-sigma modulation; Feedback loop; Force feedback; Frequency; Mechanical sensors; Wideband;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location
Chicago, IL
Print_ISBN
0-7803-3829-4
Type
conf
DOI
10.1109/SENSOR.1997.635417
Filename
635417
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