Title :
Silicon bulk micromachined accelerometer with simultaneous linear and angular sensitivity
Author :
Mizuno, Jun ; Nottmeyer, Kay ; Kobayashi, Takashi ; Minami, Kazuyuki ; Esashi, Mdsayoshi
Author_Institution :
R&D Center, Zexel Corp., Saitama, Japan
Abstract :
A silicon bulk micromachined accelerometer structure has been fabricated and characterized, that combines linear and angular sensitivity in a single device. Unlike micromachined gyro-scopes no vibratory motion is involved for the detection of rotation, but the direct effect of linear and angular acceleration is detected by simultaneous monitoring of the displacement and tilt of the seismic mass. One axis of linear and up to two axes of angular acceleration can be measured. This combination has practical relevance for single-point sensing of the complete motion of a car body with a minimum number of sensors in applications like vehicle dynamic control or crash detection
Keywords :
accelerometers; angular velocity measurement; automotive electronics; elemental semiconductors; micromachining; microsensors; silicon; Si; Si bulk micromachined accelerometer; angular sensitivity; car body motion; crash detection; linear sensitivity; rotation detection; seismic mass displacement monitoring; seismic mass tilt monitoring; single-point sensing; vehicle dynamic control; Acceleration; Accelerometers; Monitoring; Motion control; Motion detection; Seismic measurements; Silicon; Vehicle crash testing; Vehicle detection; Vehicle dynamics;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635420
