Temperature dependence and drift of a thermal accelerometer

Silicon accelerometers are increasingly used in the automotive industry, but also applications for 3D mice or so-called gesture controlled remote controls are feasible. For such applications, small, low-cost sensors are needed which do not only meet certain requirements for sensitivity, working range or response time but can also work in a large temperature range as occurs in a car. In this paper, an accelerometer is described, which is based on a thermal principle. This accelerometer works at frequencies up to 300 Hz, has an output signal of about 20 mV/g and shows very low temperature dependence and drift for a thermal device