Dynamic behavior of a new two-axis accelerometer

Author

Velten, Th ; He, C.Y. ; Obermeier, E.

Author_Institution

Microsensor & Microactuator Technol. Center, Tech. Univ. Berlin, Germany

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

1217

Abstract

The dynamic behavior of a piezoresistive two-axis accelerometer for the range of ±5 g and 300 Hz is presented. Damping of the sensor is provided by a squeeze film between the seismic mass and a glass plate. Critical damping is achieved by variation of the gap width at atmospheric pressure. The measured resonance step-up at a frequency of 300 Hz is 1.06 for x-accelerations and 0.992 for z-accelerations. The linearity errors are below 0.6% FSO

Keywords

accelerometers; damping; dynamic response; frequency response; micromechanical resonators; microsensors; piezoresistive devices; 1060 Hz; 2080 Hz; 300 Hz; critical damping; dynamic behavior; frequency response; gap width variation; gesture recognition; glass plate; linearity errors; piezoresistive two-axis accelerometer; resonance step-up; seismic mass; sensor damping; squeeze film; x-accelerations; z-accelerations; Acceleration; Accelerometers; Damping; Equations; Frequency measurement; Glass; Resonance; Resonant frequency; Seismic measurements; Viscosity;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635427

Filename

635427