DocumentCode
2247956
Title
A thermopneumatic microfluidic system
Author
Grosjean, C. ; Xing Yang ; Yu-Chong Tai
Author_Institution
Caltech Micromachining Lab., California Inst. of Technol., Pasadena, CA, USA
fYear
2002
fDate
24-24 Jan. 2002
Firstpage
24
Lastpage
27
Abstract
A self-contained planar microfluidic system using thermopneumatic actuation has been demonstrated. Using a novel suspended silicon island heater fabricated by deep reactive ion etching (DRIE), and a precision machined acrylic fluidic substrate with a matching silicone rubber membrane, a self-contained system of channels, valves, and a pump has been demonstrated using air as a working fluid.
Keywords
microfluidics; micromachining; pneumatic control equipment; sputter etching; Si; acrylic fluidic substrate; channel; deep reactive ion etching; precision machining; pump; self-contained planar microfluidic system; silicone rubber membrane; suspended silicon island heater; thermopneumatic actuation; valve; Actuators; Biomembranes; Etching; Fabrication; Heat pumps; Heat transfer; Microfluidics; Rubber; Silicon; Valves;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location
Las Vegas, NV, USA
ISSN
1084-6999
Print_ISBN
0-7803-7185-2
Type
conf
DOI
10.1109/MEMSYS.2002.984051
Filename
984051
Link To Document