Title :
Double-notch-shaped microdisk resonator-based devices in silicon-on-insulator
Author :
Luo, Xianshu ; Li, Chao ; Poon, Andrew W.
Author_Institution :
Dept. of Electron. & Comput. Eng., Hong Kong Univ. of Sci. & Technol., Kowloon
Abstract :
The authors demonstrate double-notch-shaped microdisk resonator-based filters with waveguide butt-coupling in silicon-on-insulator. Our filter demonstrates whispering-gallery-like modes with Q exceeding 104. We also propose and fabricate electro-optic modulators using this structure integrated with a metal-oxide-semiconductor capacitor.
Keywords :
MOS capacitors; electro-optical modulation; micromechanical resonators; silicon-on-insulator; whispering gallery modes; channel filters; double-notch-shaped microdisk resonators; electro-optic modulators; metal-oxide-semiconductor capacitor; silicon-on-insulator substrate; waveguide butt-coupling; whispering-gallery-like modes; Electrooptic devices; Electrooptic modulators; MOS capacitors; Optical filters; Optical resonators; Optical waveguides; Resonance; Resonator filters; Silicon on insulator technology; Throughput; (230.4110) Modulators; (230.5750) Resonators;
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9
