• DocumentCode
    2248836
  • Title

    Double-notch-shaped microdisk resonator-based devices in silicon-on-insulator

  • Author

    Luo, Xianshu ; Li, Chao ; Poon, Andrew W.

  • Author_Institution
    Dept. of Electron. & Comput. Eng., Hong Kong Univ. of Sci. & Technol., Kowloon
  • fYear
    2008
  • fDate
    4-9 May 2008
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    The authors demonstrate double-notch-shaped microdisk resonator-based filters with waveguide butt-coupling in silicon-on-insulator. Our filter demonstrates whispering-gallery-like modes with Q exceeding 104. We also propose and fabricate electro-optic modulators using this structure integrated with a metal-oxide-semiconductor capacitor.
  • Keywords
    MOS capacitors; electro-optical modulation; micromechanical resonators; silicon-on-insulator; whispering gallery modes; channel filters; double-notch-shaped microdisk resonators; electro-optic modulators; metal-oxide-semiconductor capacitor; silicon-on-insulator substrate; waveguide butt-coupling; whispering-gallery-like modes; Electrooptic devices; Electrooptic modulators; MOS capacitors; Optical filters; Optical resonators; Optical waveguides; Resonance; Resonator filters; Silicon on insulator technology; Throughput; (230.4110) Modulators; (230.5750) Resonators;
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-55752-859-9
  • Type

    conf

  • Filename
    4571991