Dynamics of mass-limited laser plasma targets as sources for EUVL

Summary form only given. We report a detailed experimental and theoretical study of the plasma and radiation dynamics of droplet targets. For the first time the interaction region is investigated using separate optical probing techniques, revealing the symmetry and temporal evolution of the plasma expansion. This is compared with the predictions of hydrodynamic code calculations of the evolution of the electron density and temperature profiles. Details of the ionization state of the plasma are investigated spectroscopically, using a high-resolution flat field spectrograph and a new transmission grating spectrograph. Correspondence of the line emission with predicted line intensities from an atomic physics code is made to acquire a detailed understanding of the ionization dynamics in the plasma. These advances can now be extended to other laser interaction conditions with limited mass targets. This could lead to the development of a laser-plasma sources that are even more effective than current sources.