Title :
Er doped silicon-rich-silicon nitride(SRSN) Microdisk
Author :
Chang, Jee Soo ; Lee, Shinyoung ; Shin, Jung H. ; Shin, Jae-Heon ; Sung, Gun Yong
Author_Institution :
Dept. of Phys., Korea Adv. Inst. of Sci. & Technol. (KAIST), Daejeon
Abstract :
Two types of Er doped silicon-rich silicon nitride(SRSN) based microdisks were fabricated. Optical property such as quality factors and emission spectrum were measured by using tapered fiber.
Keywords :
erbium; laser cavity resonators; microdisc lasers; optical fabrication; photolithography; silicon compounds; sputter etching; dry plasma etching; emission spectrum; optical lithography; quality factors; silicon-rich-silicon nitride based microdisks; tapered fiiber; transmission spectra; wet chemical etching; Dry etching; Erbium; Optical buffering; Optical films; Optical refraction; Optical variables control; Plasma measurements; Q factor; Silicon; Wet etching;
Conference_Titel :
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-1173-3
Electronic_ISBN :
978-1-4244-1174-0
DOI :
10.1109/CLEOPR.2007.4391627
