Title :
Characteristics of hard DLC film formed by gas cluster ion beam assisted deposition
Author :
Kanda, Kazuhiro ; Kitagawa, Teruyuki ; Shimizugawa, Yutaka ; Haruyama, Yuichi ; Matsui, Shinji ; Terasawa, Mititaka ; Tsubakino, Harushige ; Yamada, Isao ; Gejo, Tatsuo ; Kamata, Masao
Author_Institution :
Lab. of Adv. Sci. & Technol. for Ind., Himeji Inst. of Technol., Hyogo, Japan
fDate :
Oct. 31 2001-Nov. 2 2001
Abstract :
DLC films formed by gas cluster ion beam (GCIB) assisted deposition were investigated by NEXAFS using synchrotron radiation.
Keywords :
EXAFS; carbon; ion beam assisted deposition; synchrotron radiation; thin films; C; GCIB assisted deposition; NEXAFS; gas cluster ion beam assisted deposition; hard DLC film; synchrotron radiation; Acceleration; Amorphous materials; Argon; Atomic layer deposition; Chemical industry; Chemical technology; Diamond-like carbon; Ion beams; Organic materials; Resonance;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2001 International
Conference_Location :
Shimane, Japan
Print_ISBN :
4-89114-017-8
DOI :
10.1109/IMNC.2001.984114
