• DocumentCode
    2250328
  • Title

    Chemical beam epitaxy of CoGa on GaAs using GaEt3 and CpCo(CO)2 as dual organometallic sources

  • Author

    Viguier, N. ; Maury, F.

  • Author_Institution
    Lab. de Cristallochimie, Ractive et Protection des Mater., CNRS, Toulouse, France
  • fYear
    1997
  • fDate
    16-19 March 1997
  • Firstpage
    158
  • Lastpage
    160
  • Abstract
    We have investigated for the first time the epitaxial growth of CoGa thin films on (100)GaAs using the separate sources CpCo(CO)/sub 2/ and GaEt/sub 3/ by chemical beam epitaxy (CBE), also called metalorganic molecular beam epitaxy (MOMBE). The gallium source GaEt/sub 3/ was preferred to GaMe/sub 3/ because it is known to be thermally less stable and it induces less carbon contamination in the films grown under reduce pressure. The compound CpCo(CO)/sub 2/ was selected because it is a volatile liquid which has a decomposition temperature range compatible with GaEt/sub 3/.
  • Keywords
    chemical beam epitaxial growth; cobalt alloys; gallium compounds; metallic epitaxial layers; (100)GaAs substrate; CoGa; CoGa thin film; CpCo(CO)/sub 2/; GaAs; GaEt/sub 3/; chemical beam epitaxy; dual organometallic source; epitaxial growth; metalorganic molecular beam epitaxy; Chemicals; Epitaxial growth; Gallium arsenide; III-V semiconductor materials; Intermetallic; Lattices; Metallization; Molecular beam epitaxial growth; Temperature distribution; Thermal stability;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
  • Conference_Location
    Villard de Lans, France
  • ISSN
    1266-0167
  • Type

    conf

  • DOI
    10.1109/MAM.1997.621100
  • Filename
    621100