Title :
Preparation of thick PZT film by electrostatic spray deposition (ESD) for the application in micro-system technology
Author :
Jian Lu ; Jiaru Chu ; Wenhao Huang ; Zhimin Ping
Author_Institution :
Dept. of Precision Machinery & Instrum., Univ. of Sci. & Technol. of China, Hefei, China
fDate :
Oct. 31 2001-Nov. 2 2001
Abstract :
As one of the most useful functional materials, PZT films are of great interest in micro-systems for the fabrication of microsensors and microactuators. In this paper, we introduce a new deposition method for thick PZT film preparation, named "electrostatic spray deposition (ESD)", using sol-gel solution as precursors. It offers the advantages of high film growth rate, easy control of film compositions, simple setup and low cost. Our results proved that it is a promising method for thick PZT film preparation with relatively good piezoelectric properties.
Keywords :
lead compounds; micromechanical devices; piezoelectric thin films; sol-gel processing; spray coatings; PZT; PZT thick film; PbZrO3TiO3; electrostatic spray deposition; micro-system technology; piezoelectric properties; sol-gel solution; Annealing; Ceramics; Electrodes; Electrostatic discharge; Morphology; Optical films; Piezoelectric films; Spraying; Temperature; X-ray scattering;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2001 International
Conference_Location :
Shimane, Japan
Print_ISBN :
4-89114-017-8
DOI :
10.1109/IMNC.2001.984159
