Design and fabrication of 1D and 2D micro scanners actuated by double layered PZT bimorph beams

Author

Jiunnjye Tsaur ; Lulu Zhang ; Maeda, R. ; Matsumoto, S. ; Sommawan Khumpuang ; Jiangwen Wan

Author_Institution

Nat. Inst. of Adv. Ind. Sci. & Technol., Tsukuba, Japan

fYear

2001

fDate

Oct. 31 2001-Nov. 2 2001

Firstpage

204

Lastpage

205

Abstract

Micro scanners including 1D scanner beams and 2D scanning micromirrors are designed and fabricated. In order to yield great actuation force and large scanning angle, double layered PZT beams were developed in this study. In the case of 1D scanner beams (750/spl times/230 /spl mu/m/sup 2/), the optical scanning angle was 41.2 degree while driven dynamically with 5 V (AC) at 2706 Hz. Under the applied bias of 10 V (DC), the optical deflection angle reached 34.3 degree. Combined with four double layered PZT bimorph beams, a 2D scanning micromirror was fabricated successfully.

Keywords

micro-optics; microactuators; mirrors; optical fabrication; optical scanners; 10 V; 1D micro scanners; 1D scanner beams; 2706 Hz; 2D micro scanners; 2D scanning micromirrors; 5 V; PZT; PZT bimorph beams; PbZrO3TiO3; actuation force; double layered PZT beams; fabrication process; optical scanning angle; Electrodes; Fabrication; Fasteners; Laser beams; Micromirrors; Mirrors; Optical beams; Textile industry; Voltage; Wet etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 2001 International

Conference_Location

Shimane, Japan

Print_ISBN

4-89114-017-8

Type

conf

DOI

10.1109/IMNC.2001.984161

Filename

984161