Design and characterization of a quasi-optical mixer fabricated using silicon micromachining

Author

Neculoiu, D. ; Petrini, I. ; Buiculescu, C. ; Dragoman, M. ; Muller, A. ; Bartolucci, G. ; Marcelli, R. ; Giacomozzi, F.

Author_Institution

IMT-Bucharest, Bucharest

fYear

2006

fDate

16-19 May 2006

Firstpage

210

Lastpage

213

Abstract

A silicon micromachined uniplanar quasi-optical mixer is presented for the first time. The circuit is based on a membrane-supported double folded slot antenna and a GaAs flip chip Schottky diode, mounted on the bulk area of the structure. The 1.5 mum thin dielectric membrane was obtained by micromachining of high resistivity (100) oriented silicon. The circuit is designed for the 38 GHz frequency range using coplanar waveguide technology and full-wave electromagnetic simulations. The mixer is characterized using the isotropic conversion losses parameter and a value of 10 dB was measured at 38 GHz

Keywords

Schottky diode mixers; coplanar waveguides; electromagnetic waves; flip-chip devices; gallium arsenide; micromachining; millimetre wave mixers; silicon; slot antennas; 1.5 mum; 38 GHz; GaAs; coplanar waveguide technology; dielectric membrane; flip chip Schottky diode; full-wave electromagnetic simulations; high resistivity oriented silicon; isotropic conversion losses parameter; membrane-supported double folded slot antenna; silicon micromachining; uniplanar quasi-optical mixer fabrication; Biomembranes; Circuits; Dielectric loss measurement; Electromagnetic waveguides; Flip chip; Gallium arsenide; Micromachining; Schottky diodes; Silicon; Slot antennas;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrotechnical Conference, 2006. MELECON 2006. IEEE Mediterranean

Conference_Location

Malaga

Print_ISBN

1-4244-0087-2

Type

conf

DOI

10.1109/MELCON.2006.1653074

Filename

1653074