Title :
Polarization-analyzing CMOS image sensor using monolithically embedded polarizer for microchemistry systems
Author :
Tokuda, Takashi ; Yamada, Hirofumi ; Sasagawa, Kiyotaka ; Ohta, Jun
Author_Institution :
Grad. Sch. of Mater. Sci., Nara Inst. of Sci. & Technol. (NAIST), Nara, Japan
Abstract :
A polarization-analyzing CMOS image sensor was designed. The sensor was designed with target applications of intelligent microchemistry system. Embedded wire grid polarizer with various angles was configured on the photodiodes. The performances of the sensor were characterized and it was demonstrated that the sensor can be used for polarization measurement with an accuracy of 0.04 deg. A polarimetric measurement of chiral solution was also successfully demonstrated.
Keywords :
CMOS image sensors; electrochemical sensors; intelligent sensors; microsensors; CMOS image sensor; embedded wire grid polarizer; intelligent microchemistry system; monolithic embedded polarizer; photodiodes; polarimetric measurement; polarization analysis; polarization measurement; CMOS image sensors; CMOS technology; Chemical sensors; Intelligent sensors; Materials science and technology; Optical polarization; Photodiodes; Sensor arrays; Sensor phenomena and characterization; Temperature sensors;
Conference_Titel :
Circuits and Systems, 2009. ISCAS 2009. IEEE International Symposium on
Conference_Location :
Taipei
Print_ISBN :
978-1-4244-3827-3
Electronic_ISBN :
978-1-4244-3828-0
DOI :
10.1109/ISCAS.2009.5117748
