Title :
Phase shifting interferometer for the characterization of nanodevices
Author :
Boher, P. ; Piel, J.P. ; Stehle, J.L. ; Dubois, A. ; Boccara, A.C.
Author_Institution :
SOPRA, Bois-Colombes, France
fDate :
Oct. 31 2001-Nov. 2 2001
Abstract :
A new phase shifting interferometry based on the integrating-bucket technique with sinusoidal phase modulation is presented. The phase modulation is achieved by sinusoidal oscillation of an objective and a mirror attached to a PZT. Phase images are produced in real time at a rate of several Hertz. The system is not very sensitive to the vibrations and gives excellent accuracies and repeatabilities which makes it very suitable to the characterization of the nanodevices.
Keywords :
integrated circuit measurement; light interferometers; nanotechnology; optical modulation; phase modulation; semiconductor device measurement; integrating-bucket technique; nanodevices; phase images; phase shifting interferometer; sinusoidal phase modulation; vibrations; Charge coupled devices; Charge-coupled image sensors; Frequency; Microscopy; Mirrors; Optical interferometry; Phase modulation; Phase shifting interferometry; Surface topography; Vibrations;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2001 International
Conference_Location :
Shimane, Japan
Print_ISBN :
4-89114-017-8
DOI :
10.1109/IMNC.2001.984182
