A novel seesaw-type RF MEMS switch

A novel RF MEMS switch design is proposed which uses a seesaw-type movable part to implement a capacitive shunt across a CPW transmission line. Unlike in other designs elastic recovery force is not used to restore the movable part to its rest position. Instead the switching action is solely induced through separate pull-up and pull-down electrodes. The design allows independent definition of the main electrical parameters (C-L-R) through the specification of the movable part geometries, thus achieving programmable maximum isolation for a given RF frequency. The theoretical power handling capability is augmented relative to that of other designs due to the inclusion of a pull-up electrode. For a design with a 10 mum gap between the movable part and the electrodes, and an actuation voltage of 80 V, dynamic analysis shows a switching time of less than 7 mus. The device can operate with lower actuation voltages (as low as 5 V) with a tradeoff in the switching time