Title :
Design of tunable MEMS filters for millimeter wave systems
Author :
Takacs, Alexandru ; Neculoiu, Dan ; Vasilache, Dan ; Muller, Alexandru ; Pons, Patrick ; Bary, Laurent ; Plana, Robert
Author_Institution :
IMT Bucharest
Abstract :
This paper addresses the design of tunable RF MEMS (radio frequency micro-electro-mechanical systems) filters for millimeter wave applications. Based on an original topology, a tunable bandpass filter is designed in the 60 GHz frequency range. The tunable behavior is achieved using capacitive MEMS shunt switches. The overall filter is designed on membrane substrate in order to keep down the losses and the dispersion
Keywords :
band-pass filters; circuit tuning; microswitches; millimetre wave filters; network synthesis; capacitive MEMS shunt switches; millimeter wave systems; radio frequency micro-electro-mechanical systems; tunable MEMS filters; tunable RF MEMS; tunable bandpass filter; Band pass filters; Biomembranes; Coplanar waveguides; FCC; Frequency; Micromechanical devices; Microswitches; Switches; Topology; Tunable circuits and devices;
Conference_Titel :
Electrotechnical Conference, 2006. MELECON 2006. IEEE Mediterranean
Conference_Location :
Malaga
Print_ISBN :
1-4244-0087-2
DOI :
10.1109/MELCON.2006.1653098
