• DocumentCode
    2251660
  • Title

    Design of tunable MEMS filters for millimeter wave systems

  • Author

    Takacs, Alexandru ; Neculoiu, Dan ; Vasilache, Dan ; Muller, Alexandru ; Pons, Patrick ; Bary, Laurent ; Plana, Robert

  • Author_Institution
    IMT Bucharest
  • fYear
    2006
  • fDate
    16-19 May 2006
  • Firstpage
    301
  • Lastpage
    304
  • Abstract
    This paper addresses the design of tunable RF MEMS (radio frequency micro-electro-mechanical systems) filters for millimeter wave applications. Based on an original topology, a tunable bandpass filter is designed in the 60 GHz frequency range. The tunable behavior is achieved using capacitive MEMS shunt switches. The overall filter is designed on membrane substrate in order to keep down the losses and the dispersion
  • Keywords
    band-pass filters; circuit tuning; microswitches; millimetre wave filters; network synthesis; capacitive MEMS shunt switches; millimeter wave systems; radio frequency micro-electro-mechanical systems; tunable MEMS filters; tunable RF MEMS; tunable bandpass filter; Band pass filters; Biomembranes; Coplanar waveguides; FCC; Frequency; Micromechanical devices; Microswitches; Switches; Topology; Tunable circuits and devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrotechnical Conference, 2006. MELECON 2006. IEEE Mediterranean
  • Conference_Location
    Malaga
  • Print_ISBN
    1-4244-0087-2
  • Type

    conf

  • DOI
    10.1109/MELCON.2006.1653098
  • Filename
    1653098