Title :
Experimental demonstration of locally oxidized hybrid silicon-plasmonic waveguide
Author :
Desiatov, Boris ; Goykhman, Ilya ; Levy, Uriel
Author_Institution :
Dept. of Appl. Phys., Hebrew Univ. of Jerusalem, Jerusalem, Israel
Abstract :
We demonstrate self-aligned approach for fabrication of hybrid silicon plasmonic waveguide. The demonstrated structure provides both nanoscale confinement together with propagation length of 100 microns. Near-field measurements of propagation and coupling loss are also presented.
Keywords :
integrated optics; light propagation; nanophotonics; near-field scanning optical microscopy; optical fabrication; optical losses; optical waveguides; plasmonics; silicon-on-insulator; Si; coupling loss; locally oxidized hybrid silicon-plasmonic waveguide; nanoscale confinement; near-field measurements; propagation length; self-aligned method; Optical device fabrication; Optical waveguides; Optimized production technology; Photonics; Plasmons;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
