• DocumentCode
    2251798
  • Title

    Ultraviolet Photocodetector Based on MgxZn1-xO(0 ⩽ x ⩽ 0.36) Thin Films Deposited by RF Magnetron Sputtering

  • Author

    Lee, Hsin-Ying ; Wang, Ming-Yi ; Lee, Ching-Ting

  • Author_Institution
    Inst. of Electro-Opt. & Mater. Sci., Nat. Formosa Univ., Yunlin
  • fYear
    2007
  • fDate
    26-31 Aug. 2007
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    The MgxZn1-xO thin films for x varying from 0 to 0.36 were deposited by RF magnetron sputtering. The MgxZn1_xO films are characterized by X-ray diffraction and UV-visible spectroscopy. The MgxZn1-xO metal-semiconductor-metal ultraviolet photocodetectors (MSM-UPDs) were fabricated. We also investigated the electrical and optical properties of the MSM-UPDs.
  • Keywords
    X-ray diffraction; magnesium compounds; metal-semiconductor-metal structures; optical films; photodetectors; sputter deposition; ultraviolet detectors; ultraviolet spectroscopy; visible spectroscopy; Al2O3; MgZnO; RF magnetron sputtering; UV-visible spectroscopy; X-ray diffraction; electrical properties; metal-semiconductor-metal ultraviolet photocodetector; optical properties; thin film deposition; Lattices; Optical films; Photonic band gap; Pulsed laser deposition; Radio frequency; Spectroscopy; Sputtering; Substrates; X-ray diffraction; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
  • Conference_Location
    Seoul
  • Print_ISBN
    978-1-4244-1173-3
  • Electronic_ISBN
    978-1-4244-1174-0
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2007.4391726
  • Filename
    4391726
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2251798