• DocumentCode
    2252568
  • Title

    Self-assembly templates by selective plasma surface modification of micropatterned photoresist

  • Author

    Jeonggi Seo ; Ertekin, E. ; Pio, M.S. ; Lee, L.P.

  • Author_Institution
    Dept. of Bioeng., California Univ., Berkeley, CA, USA
  • fYear
    2002
  • fDate
    24-24 Jan. 2002
  • Firstpage
    192
  • Lastpage
    195
  • Abstract
    Self-assembly templates, consisting of micropatterned hydrophobic and hydrophilic regions, are fabricated using a plasma surface modification technique. With exposure to O/sub 2/ plasma, photoresist, silicon, and glass can be modified to hydrophilic surfaces. When followed by SF/sub 6/ or CF/sub 4/ plasma, the photoresist surface can be modified to hydrophobic while silicon and glass surfaces are not affected. The difference in surface energy between the hydrophilic and hydrophobic regions is large, as indicated by the differential contact angle of 120/spl deg/ between the two regions for wetting with water. Photonic crystals are made from colloidal solutions and protein patterning is demonstrated using self-assembly templates made by selective plasma surface modification. The maximized surface energy difference between substrate and template patterning allows ideal self-assembly of photonic crystals and selective attachment of proteins.
  • Keywords
    biological techniques; contact angle; microassembling; microlenses; optical fabrication; photonic band gap; photoresists; plasma materials processing; proteins; self-assembly; surface energy; surface treatment; O/sub 2/; O/sub 2/ plasma exposure; SF/sub 6/; SF/sub 6/ plasma; Si; colloidal solutions; differential contact angle; microlens self-assembly; micropatterned hydrophilic regions; micropatterned hydrophobic regions; micropatterned photoresist; photonic crystals; protein patterning; selective plasma surface modification; selective protein attachment; self-assembly templates; surface energy difference; tetrafluoromethane plasma; wetting; Fabrication; Glass; Lenses; Microoptics; Photonic crystals; Plasma applications; Proteins; Resists; Self-assembly; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
  • Conference_Location
    Las Vegas, NV, USA
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-7185-2
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2002.984237
  • Filename
    984237