DocumentCode
2252684
Title
Three-dimensional photonic band gap structures made by direct laser writing and silicon single-inversion
Author
Hermatschweiler, M. ; Thiel, M. ; Wegener, M. ; von Freymann, G.
Author_Institution
Inst. fur Angewandte Phys., Univ. Karlsruhe, Karlsruhe
fYear
2008
fDate
4-9 May 2008
Firstpage
1
Lastpage
2
Abstract
We realize a variety of silicon photonic crystal structures. Direct laser writing of polymeric templates (square/circular spirals and slanted pore structures) combined with a silicon single-inversion procedure leads to band gaps in the near infrared.
Keywords
laser materials processing; photonic band gap; photonic crystals; silicon; 3D photonic band gap structures; Si; direct laser writing; polymeric templates; silicon photonic crystal structures; silicon single-inversion procedure; slanted pore structures; Crystalline materials; Lattices; Optical materials; Optical polymers; Photonic band gap; Photonic crystals; Silicon; Spirals; Structural engineering; Writing; (160.5293) Photonic bandgap materials; (160.5298) Photonic crystals;
fLanguage
English
Publisher
iet
Conference_Titel
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location
San Jose, CA
Print_ISBN
978-1-55752-859-9
Type
conf
Filename
4572154
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