Saving energy and natural resource by micro-nanomachining

Author

Esashi, M.

Author_Institution

New Ind. Creation Hatchery Center, Tohoku Inst. of Technol., Sendai, Japan

fYear

2002

fDate

24-24 Jan. 2002

Firstpage

220

Lastpage

227

Abstract

Micro-nanomachining technologies have been studied with the aim of saving energy and natural resources. Wafer process packaging using electrical feedthrough in glass has been applied to micromechanical sensors as electrostatically levitating micro motors (10,000 rpm) for rotational gyroscopes. Maintenance tools as active catheters have been developed to be used in narrow space for extended life. Technologies for compact power source as fabrication of ceramic microstructures using silicon mold and as measurement of hydrogen storage capacity of carbon nanotube were developed.

Keywords

carbon nanotubes; electrostatic devices; elemental semiconductors; gyroscopes; micromachining; micromotors; microsensors; nanotechnology; semiconductor device packaging; silicon; Si; active catheters; carbon nanotube; ceramic microstructures; compact power source; electrical feedthrough; electrostatically levitating micro motors; energy resources; hydrogen storage capacity; micro-nanomachining; micromechanical sensors; rotational gyroscopes; silicon mold; wafer process packaging; Catheters; Ceramics; Fabrication; Glass; Gyroscopes; Micromechanical devices; Micromotors; Microstructure; Packaging; Space technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Conference_Location

Las Vegas, NV, USA

ISSN

1084-6999

Print_ISBN

0-7803-7185-2

Type

conf

DOI

10.1109/MEMSYS.2002.984243

Filename

984243