Title :
Focused high frequency ultrasonic transducers for minimally invasive imaging
Author :
Fleischman, A. ; Modi, R. ; Nair, A. ; Lockwood, G. ; Roy, S.
Author_Institution :
Dept. of Biomed. Eng., Cleveland Clinic Found., OH, USA
Abstract :
Spherically focused, high frequency (30-50 MHz) ultrasonic imaging transducers are fabricated by using a piezoelectric polymer film and membrane deflection technique that is compatible with CMOS circuit fabrication. Micromachined ultrasonic transducers with 0.5-2.0 mm-diameter apertures and f-numbers ranging from 1.3-4.0 are fabricated and characterized. The transducers exhibit focused radiation patterns with 50 /spl mu/m axial resolution and bandwidths of 80-100% around center frequency values. Tissue imaging capabilities of the micromachined ultrasonic transducers are demonstrated through successful imaging of human cadaveric aorta.
Keywords :
biological tissues; biomedical ultrasonics; membranes; micromachining; piezoelectric transducers; polymer films; ultrasonic focusing; ultrasonic imaging; ultrasonic transducers; 30 to 50 MHz; CMOS circuit fabrication; aperture; biological tissue; f-number; focused radiation pattern; high-frequency ultrasonic transducer; human cadaveric aorta; membrane deflection; micromachining; minimally invasive imaging; piezoelectric polymer film; Apertures; Biomembranes; Circuits; Fabrication; Focusing; Frequency; Piezoelectric transducers; Polymer films; Ultrasonic imaging; Ultrasonic transducers;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984262
