Dynamic response and shock resistance of ferromagnetic micromechanical magnetometers

Author

Yee, J.K. ; Yang, H.H. ; Judy, J.W.

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA

fYear

2002

fDate

24-24 Jan. 2002

Firstpage

308

Lastpage

311

Abstract

We have designed, fabricated, and tested ferromagnetic micromechanical magnetometers and have characterized their dynamic response and shock resistance. The magnetometer design is similar to a compass consisting of a ferromagnetic plate and a pair of torsion beams. The susceptibility of these MEMS magnetometers to squeeze film damping is analyzed and compared to experimental results. The torsion beam geometry of the magnetometer is such that longer beams can be used to obtain a higher magnetic sensitivity without compromising device shock resistance.

Keywords

dynamic response; magnetic sensors; magnetometers; microsensors; shock waves; torsion; MEMS magnetometers; dynamic response; ferromagnetic micromechanical magnetometers; ferromagnetic plate; magnetic sensitivity; magnetometer design; shock resistance; squeeze film damping susceptibility; torsion beam geometry; torsion beams; Damping; Electric shock; Geometry; Magnetic analysis; Magnetic devices; Magnetic films; Magnetic susceptibility; Magnetometers; Micromechanical devices; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Conference_Location

Las Vegas, NV, USA

ISSN

1084-6999

Print_ISBN

0-7803-7185-2

Type

conf

DOI

10.1109/MEMSYS.2002.984264

Filename

984264