DocumentCode
2253366
Title
Hybrid mounted micromachined aluminium hot-wire for near-wall turbulence measurements
Author
Haasl, S. ; Mucha, D. ; Chernoray, V. ; Ebefors, T. ; Enoksson, P. ; Lofdahl, L. ; Stemme, G.
Author_Institution
Dept. of Signals, Sensors & Syst., R. Inst. of Technol., Stockholm, Sweden
fYear
2002
fDate
24-24 Jan. 2002
Firstpage
336
Lastpage
339
Abstract
We present the first micromachined metal hot-wire anemometer sensor for use in near-wall turbulence measurements. To measure close to the surface without the circuitry interfering with the flow, a novel hybrid assembly of the sensor has been developed. We present the design, fabrication and characteristics of this sensor.
Keywords
anemometers; micromachining; microsensors; turbulence; Al; anemometer sensor; fabrication; hybrid assembly; hybrid mounted hot-wire; micromachined hot-wire; near-wall turbulence measurements; sensor characteristics; Aluminum; Electric resistance; Electrical resistance measurement; Fabrication; Fluid flow measurement; Sensor phenomena and characterization; Sensor systems; Thermal sensors; Velocity measurement; Wire;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location
Las Vegas, NV, USA
ISSN
1084-6999
Print_ISBN
0-7803-7185-2
Type
conf
DOI
10.1109/MEMSYS.2002.984271
Filename
984271
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